US 12,438,022 B2
Method and apparatus for securing semiconductor device carrying boat in multi-boat tray
Chun-Yu Lin, Taichung (TW); Chih-Hung Huang, Hsinchu (TW); Yu-Chen Chen, Hemei (TW); Cheng-Lung Wu, Zhunan (TW); and Jiun-Rong Pai, Zhubei (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Feb. 22, 2022, as Appl. No. 17/677,142.
Prior Publication US 2023/0268210 A1, Aug. 24, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67309 (2013.01) [H01L 21/67333 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An automated handling system for transporting semiconductor devices, comprising:
a table having a pin; and
a tray including a well configured to receive a boat, the boat carrying one or more semiconductor devices thereon, and a clamping mechanism that selectively clamps the boat received in the well of the tray, the clamping mechanism including a plunger and a biasing member that applies biasing to the plunger to press the plunger against the boat, the plunger having a notch;
wherein the plunger of the clamping mechanism is automatically disengaged from the boat when the tray is positioned on the table by the pin of the table engaging the notch of the plunger and moving the plunger away from the boat against the biasing applied by the biasing member, and the clamping mechanism is automatically engaged with the boat by the biasing of the plunger applied by the biasing member when the pin of the table disengages from the notch of the plunger of the clamping mechanism as the tray is removed from the table.