| CPC H01L 21/67253 (2013.01) [B32B 43/006 (2013.01); G01J 3/2803 (2013.01); H01L 21/67132 (2013.01); H10H 20/80 (2025.01); B32B 2309/72 (2013.01)] | 8 Claims |

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1. A processing and detecting apparatus, configured to process and detect an object and comprising:
a carrying platform, configured to carry the object, the object comprising a substrate and a plurality of micro light emitting diodes disposed on the substrate;
a laser unit, configured to emit a laser beam, wherein the laser beam is applied to perform a working procedure on the object on the carrying platform and excite each of the micro light emitting diodes to radiate a light signal;
a wavelength measuring unit, configured to measure the light signal of each of the micro light emitting diodes in real time to obtain a spectrum of each of the micro light emitting diodes; and
a computing unit, configured to analyze the spectra of the micro light emitting diodes to determine whether the working procedure is abnormal,
wherein the wavelength measuring unit comprises:
a dispersion device, disposed on a light path of the light signal to disperse the light signal; and
a plurality of photodiodes, arranged on the light path of the dispersed light signal along a dispersion direction of the dispersion device to receive and detect the light signal, wherein arrangement of the photodiodes comprises at least partially different pitch spacings between adjacent photodiodes.
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