US 12,438,019 B2
Processing and detecting apparatus
Yen-Mu Chen, MiaoLi County (TW)
Assigned to PlayNitride Display Co., Ltd., MiaoLi (TW)
Filed by PlayNitride Display Co., Ltd., MiaoLi County (TW)
Filed on Jun. 18, 2023, as Appl. No. 18/337,031.
Claims priority of application No. 112118007 (TW), filed on May 16, 2023.
Prior Publication US 2024/0387211 A1, Nov. 21, 2024
Int. Cl. H01L 21/67 (2006.01); B32B 43/00 (2006.01); G01J 3/28 (2006.01); H10H 20/80 (2025.01)
CPC H01L 21/67253 (2013.01) [B32B 43/006 (2013.01); G01J 3/2803 (2013.01); H01L 21/67132 (2013.01); H10H 20/80 (2025.01); B32B 2309/72 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A processing and detecting apparatus, configured to process and detect an object and comprising:
a carrying platform, configured to carry the object, the object comprising a substrate and a plurality of micro light emitting diodes disposed on the substrate;
a laser unit, configured to emit a laser beam, wherein the laser beam is applied to perform a working procedure on the object on the carrying platform and excite each of the micro light emitting diodes to radiate a light signal;
a wavelength measuring unit, configured to measure the light signal of each of the micro light emitting diodes in real time to obtain a spectrum of each of the micro light emitting diodes; and
a computing unit, configured to analyze the spectra of the micro light emitting diodes to determine whether the working procedure is abnormal,
wherein the wavelength measuring unit comprises:
a dispersion device, disposed on a light path of the light signal to disperse the light signal; and
a plurality of photodiodes, arranged on the light path of the dispersed light signal along a dispersion direction of the dispersion device to receive and detect the light signal, wherein arrangement of the photodiodes comprises at least partially different pitch spacings between adjacent photodiodes.