US 12,438,018 B2
Method of supplying chemical liquid
Yu-Cheng Chang, Miaoli County (TW); Keng-Hui Pan, Tainan (TW); Chieh-Jan Huang, Hsinchu (TW); Ming-Lee Lee, Kaohsiung (TW); and Chiang-Jeh Chen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu (TW)
Filed on Jun. 9, 2023, as Appl. No. 18/332,261.
Application 18/332,261 is a continuation of application No. 16/837,507, filed on Apr. 1, 2020, granted, now 11,715,656.
Claims priority of provisional application 62/953,756, filed on Dec. 26, 2019.
Prior Publication US 2023/0326772 A1, Oct. 12, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01)
CPC H01L 21/67253 (2013.01) [H01L 21/02008 (2013.01); H01L 21/306 (2013.01); H01L 21/6715 (2013.01); H01L 21/67294 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
moving a drum containing a chemical liquid into a chamber of a chemical liquid supplying system;
connecting the drum with a testing pipe;
pumping the chemical liquid from the drum to the testing pipe;
monitoring a condition of the chemical liquid flowing through the testing pipe; and
determining whether the chemical liquid is supplied to a processing tool based on the condition of the chemical liquid.