US 12,438,011 B2
Apparatus and method for controlling a flow process material to a deposition chamber
Alexander Lerner, San Jose, CA (US); Roey Shaviv, Palo Alto, CA (US); Phillip Stout, Santa Clara, CA (US); Joseph M Ranish, San Jose, CA (US); Prashanth Kothnur, San Jose, CA (US); and Satish Radhakrishnan, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Jul. 18, 2022, as Appl. No. 17/867,589.
Application 17/867,589 is a continuation of application No. 16/442,527, filed on Jun. 16, 2019, granted, now 11,393,703.
Claims priority of provisional application 62/686,492, filed on Jun. 18, 2018.
Prior Publication US 2022/0351988 A1, Nov. 3, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01)
CPC H01L 21/67098 (2013.01) [C23C 16/303 (2013.01); C23C 16/4412 (2013.01); C23C 16/4485 (2013.01); C23C 16/45561 (2013.01); C23C 16/45563 (2013.01); C23C 16/45565 (2013.01); C23C 16/4557 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a deposition chamber in fluid communication with one or more sublimators through one or more delivery lines, wherein the one or more sublimators each comprise an ampoule in fluid communication with the one or more delivery lines through an opening in the ampoule, and the ampoule includes at least a first temperature zone having a plurality of first heaters, the first temperature zone corresponding with a lower portion of each of the sublimators by having the plurality of first heaters surrounding lower portions of a sidewall of the ampoule, and a second temperature zone having one or more second heaters, the second temperature zone corresponding with an upper portion of each of the sublimators,
wherein the one or more delivery lines comprise one or more conduits between the deposition chamber and the one or more sublimators, and wherein the one or more conduits comprises one or more valves to open or close the one or more conduits.