US 12,438,010 B2
Apparatus for collecting by-product for semiconductor manufacturing process with improved collection space efficiency
Che Hoo Cho, Seoul (KR); Yeon Ju Lee, Hwaseong-si (KR); Ji Eun Han, Pyeongtaek-si (KR); and Woo Yeon Won, Pyeongtaek-si (KR)
Assigned to MILAEBO CO., LTD., Pyeongtaek-si (KR)
Filed by MILAEBO CO., LTD., Pyeongtaek-si (KR)
Filed on Aug. 2, 2023, as Appl. No. 18/364,371.
Claims priority of application No. 10-2023-0037811 (KR), filed on Mar. 23, 2023.
Prior Publication US 2024/0321595 A1, Sep. 26, 2024
Int. Cl. B01D 53/00 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67017 (2013.01) [B01D 53/005 (2013.01); H01L 21/67098 (2013.01); B01D 2258/0216 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An apparatus for collecting by-products for a semiconductor manufacturing process with improved collection space efficiency, which is installed in an exhaust line between a process chamber and a vacuum pump, the apparatus comprising:
a housing (1) configured to accommodate introduced exhaust gas discharged from the processor chamber and discharge the exhaust gas;
a heater (2) configured to heat and distribute the exhaust gas; and
an internal collection tower (3) configured to collect by-products, wherein
the internal collection tower (3) configured by an upper-end collection part (31), an intermediate collection part (32), and a lower-end collection part (33) provided on multiple stages and configured to collect the by-products while changing a flow path direction of the introduced exhaust gas by maximally using a limited space in the housing, such that the by-products are mainly collected by outer peripheral vertical blade plates (322) at an outer periphery having an open structure to allow gas to smooth flow between an inner region and an inner wall of the housing (1), the by-products are collected by the intermediate collection part (32) having inner vertical blade plates (323) and bottom plates (324) each having a lower height than the outer peripheral vertical blade plate (322), and then the by-products are accumulated in an internal space of the apparatus,
wherein the upper-end collection part (31) comprises:
a quadrangular first horizontal collection plate (311) having a main gas hole (311a) and a plurality of auxiliary gas holes (311b, 311c) formed around the main gas hole (311a) and configured to collect the by-products while guiding the flow of the exhaust gas, which flows downward from the heater, to the central portion;
a plurality of triangular collection plates (312) arranged radially along an outer periphery of an upper surface of the first horizontal collection plate and configured to collect the by-products;
bent-type collection plates (313) provided at four edges of an upper surface of the first horizontal collection plate and protruding to be higher than the triangular collection plates, the bent-type collection plates (313) being configured to collect the by-products while having an open structure so as not to hinder the introduction flow of the exhaust gas; and
fastening rods (314) protruding downward and corresponding to vertices of a bottom surface of the first horizontal collection plate, the fastening rods (314) being fastened and fixed to an internal collection tower supports (133), and wherein the bent-type collection plate (313) comprises:
a pair of support bodies (313a) provided at an outer periphery of the first horizontal collection plate; and
a connection body (313b) configured to connect upper ends of the support bodies.