US 12,438,008 B2
Method of producing assembly of stacked elements having resin layer with fillers
Yongfu Cai, Tokyo (JP); and Shuhei Miyazaki, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK Corporation, Tokyo (JP)
Filed on Jun. 14, 2024, as Appl. No. 18/743,313.
Application 18/743,313 is a continuation of application No. 17/696,253, filed on Mar. 16, 2022, granted, now 12,046,524.
Application 17/696,253 is a continuation of application No. 16/685,141, filed on Nov. 15, 2019, granted, now 11,322,418, issued on May 3, 2022.
Claims priority of application No. 2019-042832 (JP), filed on Mar. 8, 2019.
Prior Publication US 2024/0332103 A1, Oct. 3, 2024
Int. Cl. H01L 21/56 (2006.01); H01L 23/00 (2006.01); H01L 23/29 (2006.01)
CPC H01L 21/56 (2013.01) [H01L 23/295 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 24/92 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of manufacturing an assembly of stacked elements comprising:
forming a first element having a first surface;
forming a resin layer on the first surface, wherein the resin layer contains a plurality of fillers;
grinding an upper surface of the resin layer; and
forming a second element on the upper surface of the resin layer that has been ground, wherein the second element has a second surface that is in contact with the upper surface,
wherein
at least one filler of the plurality of fillers is in direct contact with both the first surface and the second surface,
a filler of the plurality of fillers that is exposed on the upper surface of the resin layer after grinding of the resin layer is made flat on the upper surface, and
the first surface and the second surface are parallel to each other.