US 12,437,997 B2
Method of fabricating metal mask
Yun-Pei Yang, Hsinchu County (TW); Jen-Shun Lin, Hsinchu County (TW); and Yu-Wei Chang, Hsinchu County (TW)
Assigned to DARWIN PRECISIONS CORPORATION, Hsinchu County (TW)
Filed by Darwin Precisions Corporation, Hsinchu County (TW)
Filed on Mar. 7, 2023, as Appl. No. 18/179,654.
Application 18/179,654 is a division of application No. 17/547,260, filed on Dec. 10, 2021, granted, now 12,308,234.
Claims priority of application No. 110131682 (TW), filed on Aug. 26, 2021.
Prior Publication US 2023/0207319 A1, Jun. 29, 2023
Int. Cl. H01L 21/033 (2006.01); H01L 21/74 (2006.01); H01L 21/762 (2006.01)
CPC H01L 21/0334 (2013.01) [H01L 21/743 (2013.01); H01L 21/76229 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of fabricating a metal mask, comprising:
receiving a conductive substrate, wherein the conductive substrate comprises:
a first surface;
a second surface, opposite to the first surface;
a third surface, connecting the first surface and the second surface;
a fourth surface, opposite to the third surface and connecting the first surface and the second surface;
forming a plurality of trenches in a direction from the first surface to the second surface and a plurality of protrusions in the conductive substrate, wherein the plurality of the trenches and the plurality of the protrusions are alternately arranged;
filling the plurality of the trenches with a first insulation material, wherein the first insulation material covers a first area of the plurality of the protrusions;
forming a metal layer on the conductive substrate, wherein the metal layer overlies a second area of the plurality of the protrusions, and the second area is different from the first area;
removing the first insulation material; and
removing the conductive substrate such that the metal layer becomes a metal mask with a three-dimensional structure, wherein the metal mask with the three-dimensional structure comprises a plurality of strip-shaped structures.