US 12,437,974 B2
Solenoid bank with standby solenoid valves for controlling pneumatic valves of a substrate processing system
Swajeeth Pilot Panchangam, Bangalore (IN); Vinayakaraddy Gulabal, Yadgir (IN); Yeshwanth Saghi, Bangalore (IN); and Keerthi Gowdaru, Bengaluru (IN)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 18/020,302
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Aug. 17, 2021, PCT No. PCT/US2021/046277
§ 371(c)(1), (2) Date Feb. 8, 2023,
PCT Pub. No. WO2022/040166, PCT Pub. Date Feb. 24, 2022.
Claims priority of provisional application 63/068,439, filed on Aug. 21, 2020.
Prior Publication US 2023/0274915 A1, Aug. 31, 2023
Int. Cl. H01J 37/32 (2006.01); C23C 16/455 (2006.01)
CPC H01J 37/32449 (2013.01) [C23C 16/45544 (2013.01); C23C 16/45561 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluid control system for a substrate processing system, comprising:
(M+N) inlets configured to fluidly connect to M solenoid valves and N standby solenoid valves, respectively, where M and N are integers greater than zero;
M outputs configured to be fluidly connected to M pneumatic valves; and
a valve switching system comprising rotating shaft selectors, configured to:
selectively block 1 to N of the M inlets corresponding to 1 to N failed ones of M solenoid valves, respectively; and
supply fluid from 1 to N of the N standby solenoid valves to 1 to N of the M outputs corresponding to the 1 to N failed ones of M solenoid valves, respectively.