US 12,437,967 B2
Ion current droop compensation
Christopher Bowman, Seattle, WA (US); Connor Liston, Seattle, WA (US); Kenneth Miller, Seattle, WA (US); and Timothy Ziemba, Bainbridge Island, WA (US)
Assigned to Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed by EAGLE HARBOR TECHNOLOGIES, INC., Seattle, WA (US)
Filed on Apr. 22, 2024, as Appl. No. 18/642,777.
Application 18/642,777 is a continuation of application No. 17/493,835, filed on Oct. 4, 2021, granted, now 11,967,484.
Application 17/493,835 is a continuation in part of application No. 17/372,398, filed on Jul. 9, 2021, granted, now 11,404,247.
Claims priority of provisional application 63/087,150, filed on Oct. 2, 2020.
Claims priority of provisional application 63/049,907, filed on Jul. 9, 2020.
Prior Publication US 2024/0347318 A1, Oct. 17, 2024
Int. Cl. H01J 37/32 (2006.01); H01J 49/24 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/32174 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A pulse generator comprising:
a DC source;
a transformer comprising:
a transformer core;
a primary winding wrapped around at least a portion of the transformer core, the primary winding having a first lead and a second lead; and
a secondary winding wrapped around at least a portion of the transformer core;
a droop compensation circuit electrically coupled with first lead of the primary winding;
a first switch electrically connected with the droop compensation circuit and the DC source;
a second switch electrically connected with the second lead of the primary winding and the DC source, wherein the first switch and the second switch are opened and closed at different time intervals;
a pulsing output electrically coupled with the secondary winding of the transformer that outputs high voltage bipolar pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive positive going pulses that has a negative slope; and
a plasma chamber electrically coupled with the pulsing output, wherein voltage portions between consecutive positive going pulses within the plasma chamber have a substantially flat slope.