US 12,437,962 B2
Charged particle beam apparatus
Naoko Takeda, Tokyo (JP); Natsuki Tsuno, Tokyo (JP); Satoshi Takada, Tokyo (JP); and Yuto Hattori, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/029,004
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Sep. 30, 2020, PCT No. PCT/JP2020/037168
§ 371(c)(1), (2) Date Mar. 28, 2023,
PCT Pub. No. WO2022/070311, PCT Pub. Date Apr. 7, 2022.
Prior Publication US 2023/0369012 A1, Nov. 16, 2023
Int. Cl. H01J 37/22 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A charged particle beam apparatus comprising:
a charged particle source generating a charged particle beam with which a sample is irradiated;
a light source generating a light with which the sample is irradiated;
a first detector detecting secondary charged particles obtained by irradiating the sample with the charged particle beam;
a stage on which the sample is mounted;
a position adjustment mark provided on the stage and irradiated with the charged particle beam and the light;
a second detector detecting a secondary light obtained by irradiating the position adjustment mark with the light;
a computer system controlling irradiation with the charged particle beam and irradiation with the light, acquiring a first detection signal by the first detector and a second detection signal by the second detector, and generating and displaying an image; and
a mechanism setting an irradiation position of the charged particle beam and an irradiation position of the light with respect to the stage and changing a relative positional relationship including a distance between the irradiation position of the light and the stage, under control of the computer system,
wherein the computer system:
generates a first image in which the position adjustment mark is reflected based on the first detection signal obtained by irradiating the position adjustment mark with the charged particle beam;
generates a second image in which an irradiation area of the light is reflected in the vicinity of the position adjustment mark based on the second detection signal obtained by irradiating the position adjustment mark with the light; and
adjusts the irradiation position of the charged particle beam and the irradiation position of the light based on the first image and the second image obtained when the positional relationship is changed by the mechanism.