US 12,437,959 B2
Charged particle beam device, and sample observation method employing same
Shunya Tanaka, Tokyo (JP); and Takeshi Ohmori, Tokyo (JP)
Assigned to Hitachi, Ltd., Tokyo (JP)
Appl. No. 18/014,803
Filed by Hitachi, Ltd., Tokyo (JP)
PCT Filed May 12, 2021, PCT No. PCT/JP2021/018025
§ 371(c)(1), (2) Date Jan. 6, 2023,
PCT Pub. No. WO2022/070498, PCT Pub. Date Apr. 7, 2022.
Claims priority of application No. 2020-162904 (JP), filed on Sep. 29, 2020.
Prior Publication US 2024/0242925 A1, Jul. 18, 2024
Int. Cl. H01J 37/20 (2006.01); G01N 23/2204 (2018.01); G01N 23/2251 (2018.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/20 (2013.01) [G01N 23/2204 (2013.01); G01N 23/2251 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/221 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A charged particle beam device for obtaining an observation image of a sample by irradiating the sample with a charged particle beam, the charged particle beam device comprising:
a sample stage that tilts with respect to each of two tilt axes intersecting with each other and holds the sample as well;
a boundary detection unit that detects a boundary between an upper surface and a cleavage surface of the sample from each observation image obtained while changing a tilt angle of the sample stage, and calculates a tilt of the boundary with respect to a scanning direction of the charged particle beam;
an upper surface detection unit that detects the upper surface from the observation image for each tilt angle, and calculates an upper surface vanishing angle that is a tilt angle of the sample stage at which the upper surface vanishes from the observation image; and
a calculation processing unit that calculates an initial sample direction, which is a direction of the cleavage surface when the tilt angle is zero, on the basis of the tilt of the boundary for each tilt angle and the upper surface vanishing angle.