| CPC H01G 9/0029 (2013.01) [H01G 9/2004 (2013.01); C23C 18/1254 (2013.01)] | 5 Claims |

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1. A method for fabricating a film on a substrate comprising the steps of,
(a) providing a sol precursor, wherein the sol precursor is a viscosity enhanced solution;
(b) providing a substrate;
(c) depositing the sol precursor onto the substrate via a sol-gel technique comprising a single-coating step;
(d) annealing, without first drying, the deposited sol precursor under ambient pressure at a controlled heating rate in a muffle furnace at a temperature of from about 400° C. to about 500° C., wherein the controlled heating rate is from about 30° C./min to about 70° C./min; and
(e) cooling down the sol precursor to form the film.
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