US 12,437,926 B2
Capacitor and method of manufacturing the same
Takeshi Igarashi, Yokohama (JP); and Yoshihide Komatsu, Yokohama (JP)
Assigned to Sumitomo Electric Device Innovations, Inc., Yokohama (JP)
Filed by Sumitomo Electric Device Innovations, Inc., Yokohama (JP)
Filed on Mar. 1, 2023, as Appl. No. 18/115,996.
Claims priority of application No. 2022-034090 (JP), filed on Mar. 7, 2022.
Prior Publication US 2023/0282417 A1, Sep. 7, 2023
Int. Cl. H01G 4/224 (2006.01); H01G 4/008 (2006.01); H01G 4/012 (2006.01); H01G 4/33 (2006.01); H01L 23/31 (2006.01); H10D 1/68 (2025.01); H01G 4/08 (2006.01); H01G 4/10 (2006.01); H01L 23/29 (2006.01)
CPC H01G 4/224 (2013.01) [H01G 4/008 (2013.01); H01G 4/012 (2013.01); H01G 4/33 (2013.01); H01L 23/3192 (2013.01); H10D 1/694 (2025.01); H10D 1/696 (2025.01); H01G 4/085 (2013.01); H01G 4/10 (2013.01); H01L 23/291 (2013.01); H01L 23/293 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A capacitor comprising:
a substrate;
a first electrode disposed on the substrate;
a dielectric film disposed on the first electrode;
a second electrode disposed on the dielectric film;
a first inorganic insulator film disposed on the second electrode and having an opening,
a third electrode in contact with the second electrode in a first region of at least a portion of a lower surface of the third electrode through the opening, in a second region of the lower surface of the third electrode, the second region surrounding the first region, is in contact with the first inorganic insulator film outside the opening,
a second inorganic insulator film disposed on contact with the dielectric film, the first inorganic insulator film and the third electrode; and
an organic insulator film covering an upper portion of the dielectric film, an upper portion of the second electrode, and the third electrode,
wherein the organic insulator film covering on contact with the second inorganic insulator film,
wherein in a normal direction normal to an upper surface of the substrate, the organic insulator film is not disposed between the lower surface of the third electrode and the second electrode.