| CPC H01F 27/32 (2013.01) [H01F 27/2828 (2013.01)] | 19 Claims |

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1. A coil inductor, comprising:
a first conductive coil;
a first insulation film disposed on the first conductive coil, the first insulation film comprising at least one first through hole;
a second conductive coil disposed on the first insulation film;
a second insulation film disposed on the second conductive coil, the second insulation film comprising at least one second through hole unaligned with the first through hole;
a third conductive coil disposed on the second insulation film,
wherein the first conductive coil is in electric contact with the second conductive coil through a first contact disposed in the first through hole, and the second conductive coil is in electric contact with the third conductive coil through a second contact disposed in the second through hole;
a first thickness of the first conductive coil, the second conductive coil, and the third conductive coil is between 20 micrometers and 100 micrometers;
a second thickness of the first insulation film and the second insulation film is between 5 micrometers and 50 micrometers; and
the first contact comprises a hollow structure.
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