US 12,437,513 B2
Microstructure evaluation system and sample image imaging method
Sayaka Kurata, Tokyo (JP); and Ryuichirou Tamochi, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/018,923
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed May 12, 2021, PCT No. PCT/JP2021/018024
§ 371(c)(1), (2) Date Jan. 31, 2023,
PCT Pub. No. WO2022/044443, PCT Pub. Date Mar. 3, 2022.
Claims priority of application No. 2020-140923 (JP), filed on Aug. 24, 2020.
Prior Publication US 2023/0316721 A1, Oct. 5, 2023
Int. Cl. G06V 10/77 (2022.01); G06V 10/60 (2022.01); G06V 10/62 (2022.01); G06V 10/772 (2022.01)
CPC G06V 10/7715 (2022.01) [G06V 10/60 (2022.01); G06V 10/62 (2022.01); G06V 10/772 (2022.01)] 15 Claims
OG exemplary drawing
 
1. A microstructure evaluation system, comprising:
an imaging microscope configured to image a sample placed on a stage; and
a microstructure evaluation computer configured to control the imaging microscope, wherein
the microstructure evaluation computer is configured to
extract first feature data from an image captured by the imaging microscope while changing an observation field of view on the sample; and
calculate a long-term fluctuation of the first feature data as a difference between a first moving average of the first feature data for a first plurality of captured images and a second moving average of the first feature data for a second plurality of captured images, return an observation field of view to a position before occurrence of the long-term fluctuation and re-capture to acquire a re-captured image when the long-term fluctuation exceeds a predetermined criterion, and calculate a difference between the first feature data of the captured image at the position before the occurrence of the long-term fluctuation and the first feature data of the re-captured image,
wherein the fluctuation evaluation computer determines that the long-term fluctuation is a fluctuation caused by the sample when the difference is less than a predetermined threshold, and determines that the long-term fluctuation is a fluctuation caused by the imaging microscope when the difference is equal to or greater than the predetermined threshold.