US 12,436,548 B2
Flow rate control device, flow rate control device control method, and flow rate control device control program
Yoshitomo Kanai, Osaka (JP); and Takahiro Nozawa, Osaka (JP)
Assigned to Fujikin Incorporated, Osaka (JP)
Appl. No. 17/760,395
Filed by Fujikin Incorporated, Osaka (JP)
PCT Filed Feb. 18, 2021, PCT No. PCT/JP2021/006096
§ 371(c)(1), (2) Date Aug. 9, 2022,
PCT Pub. No. WO2021/166997, PCT Pub. Date Aug. 26, 2021.
Claims priority of application No. 2020-028277 (JP), filed on Feb. 21, 2020.
Prior Publication US 2023/0063996 A1, Mar. 2, 2023
Int. Cl. G05D 7/00 (2006.01); G05B 19/416 (2006.01); G05D 7/06 (2006.01)
CPC G05D 7/0623 (2013.01) [G05B 19/416 (2013.01); G05D 7/0635 (2013.01); G05B 2219/37371 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A flow rate control device for controlling a flow rate of a fluid supplied to a controlled object to reach and to hold a final flow rate, the flow rate control device comprising:
a measured value acquisition unit acquiring a measured value by a flow rate sensor measuring a flow rate of the fluid;
a setting value acquisition unit acquiring the final flow rate and setting a flow rate set value to the final flow rate;
an adjustment value determination unit for determining, while the flow rate set value is at the final flow rate, a flow rate adjustment value different from the flow rate set value; and
a drive control unit controlling the flow rate of the fluid by adjusting an opening position of a valve supplying the fluid to the controlled object to make a difference between the measured value and the flow rate adjustment value smaller.