| CPC G05B 19/401 (2013.01) [G05B 13/048 (2013.01)] | 13 Claims |
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1. A method for calibrating a fabrication system comprising:
selecting, from a plurality of recipes, a calibration recipe including a first process parameter for performing a fabrication process on a substrate, wherein the selecting comprises:
for each recipe of the plurality of recipes:
receiving, for two or more substrates, characterization data representative of the fabrication process performed on the two or more substrates using the recipe, wherein the fabrication process for each substrate of the two or more substrates includes a different value for the first process parameter, and wherein the characterization data representative of the fabrication process on each substrate of the two or more substrates comprises a first state of the substrate prior to the fabrication process and a second state of the substrate after the fabrication process;
determining, from the first and second states of the substrates, a second process parameter; and
determining, for the fabrication processes performed on the two or more substrates using the recipe, a process relationship between the first process parameter and the second process parameter for the recipe; and
selecting the calibration recipe from the plurality of recipes based on the respective process relationships for the plurality of recipes;
determining, for the calibration recipe, a threshold variation for the process relationship between the first process parameter and the second process parameter; and
providing the calibration recipe and the threshold variation for calibrating the fabrication system.
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