US 12,436,471 B2
Control apparatus, lithography apparatus, and article manufacturing method
Mitsuhide Nishimura, Tochigi (JP); Junichi Motojima, Tochigi (JP); and Tsutomu Terao, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Aug. 4, 2022, as Appl. No. 17/880,767.
Claims priority of application No. 2021-135028 (JP), filed on Aug. 20, 2021.
Prior Publication US 2023/0057796 A1, Feb. 23, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70725 (2013.01) 12 Claims
OG exemplary drawing
 
1. A control apparatus for performing position control of a moving object, the apparatus comprising
a feedforward controller configured to perform feedforward control by giving a manipulated variable to the moving object,
wherein in a case that the feedforward control continues exceeding a predetermined time, the feedforward controller continues the feedforward control using a second manipulated variable obtained by extrapolation based on a first manipulated variable used in a predetermined section until the predetermined time.