US 12,436,461 B2
Chemical liquid, pattern forming method, and kit
Takashi Nakamura, Shizuoka (JP); Tetsuya Kamimura, Shizuoka (JP); and Satomi Takahashi, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on May 2, 2019, as Appl. No. 16/402,215.
Application 16/402,215 is a continuation of application No. PCT/JP2017/040904, filed on Nov. 14, 2017.
Claims priority of application No. 2016-225410 (JP), filed on Nov. 18, 2016; application No. 2017-030903 (JP), filed on Feb. 22, 2017; and application No. 2017-217992 (JP), filed on Nov. 13, 2017.
Prior Publication US 2019/0258165 A1, Aug. 22, 2019
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/16 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/11 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC G03F 7/038 (2013.01) [G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/0048 (2013.01); G03F 7/0397 (2013.01); G03F 7/11 (2013.01); G03F 7/16 (2013.01); G03F 7/162 (2013.01); G03F 7/2004 (2013.01); G03F 7/2041 (2013.01); H01L 21/027 (2013.01)] 20 Claims
 
1. A chemical liquid comprising:
a mixture of two or more kinds of organic solvents;
wherein the organic solvents are selected from the group consisting of compounds represented by Formulae (1) to (7), compounds represented by Formulae (9) to (11), a 3- to 5-membered cyclic ketone compound that may have a substituent, a cyclic ketone compound with 6 or more members that may have a substituent, a lactone compound, and a lactam compound,
so that the chemical liquid does not contain an ether-based compound other than the compounds represented by Formula (1), Formula (5), Formula (7), Formula (9), and Formulae (10) to (11);
in the chemical liquid containing the ether-based compound other than the compounds represented by Formula (1), Formula (5), Formula (7), Formula (9), and Formulae (10) to (11), a content of the ether-based compound other than the compounds represented by Formula (1), Formula (5), Formula (7), Formula (9), and Formulae (10) to (11) in the chemical liquid is less than 10 mass ppm with respect to a total mass of the chemical liquid, and
the chemical liquid does not include a chemical liquid in which the mixture is formed of a lactone compound and the compound represented by Formula (5), a chemical liquid in which the mixture is formed of the cyclic ketone compound with 6 or more members that may have a substituent and the compound represented by Formula (1), a chemical liquid in which the mixture is formed of a lactone compound, the compound represented by Formula (1), and the compound represented by Formula (5), a chemical liquid in which the mixture is formed of the compound represented by Formula (1) and the compound represented by Formula (3), a chemical liquid in which the mixture is formed of the compound represented by Formula (1) and the compound represented by Formula (5), and a chemical liquid in which the mixture is formed of a lactone compound and the compound represented by Formula (11),

OG Complex Work Unit Chemistry
in Formula (1), R11 and R12 each independently represent an alkyl group, R13 represents a hydrogen atom or an alkyl group, and L1 represents a single bond or an alkylene group,
in Formula (2), R21 and R22 each independently represent a hydrogen atom or an alkyl group, and L2 represents a single bond or an alkylene group,
in Formula (3), R31 and R32 each independently represent a hydrogen atom or an alkyl group, at least one of a plurality of R32's represents an alkyl group, and L3 represents a single bond or an alkylene group,
in Formula (4), R41 and R42 each independently represent an alkyl group,
in Formula (5), R51 and R52 each independently represent an alkyl group, and L5 represents a single bond or an alkylene group,
in Formula (6), R61 and R62 each independently represent an alkyl group, and R61 and R62 may form a ring by being bonded to each other,
in Formula (7), R71, R72, R73, and R74 each independently represent an alkyl group, and R71 and R72 may form a ring by being bonded to each other,
in Formula (9), R91 and R92 each independently represent an alkyl group,
in Formula (10), L10 represents a single bond or an alkylene group, and R101 represents an alkyl group, and
in Formula (11), L11 represents a single bond or an alkylene group, and R111 represents an alkyl group.