| CPC G02F 2/02 (2013.01) [G02B 1/002 (2013.01); G02F 1/011 (2013.01); G02F 1/0128 (2013.01); G02F 1/0134 (2013.01); G02F 1/353 (2013.01); G06N 10/40 (2022.01)] | 20 Claims |

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1. A system, comprising:
a resonator comprising a silicon-germanium optical waveguide and a silicon membrane that has a photoelastic coupling with the silicon-germanium optical waveguide; and
a capacitor comprising a top plate associated with the silicon membrane and a bottom plate associated with a substrate.
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