US 12,436,439 B2
Meta-structure
Yong Hae Kim, Daejeon (KR); Chi-Sun Hwang, Daejeon (KR); Kyunghee Choi, Daejeon (KR); Joo Yeon Kim, Daejeon (KR); Jaehyun Moon, Daejeon (KR); Jong-Heon Yang, Daejeon (KR); and Ji Hun Choi, Daejeon (KR)
Assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed by ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed on Jun. 27, 2023, as Appl. No. 18/342,630.
Claims priority of application No. 10-2022-0104186 (KR), filed on Aug. 19, 2022.
Prior Publication US 2024/0061306 A1, Feb. 22, 2024
Int. Cl. G02B 1/00 (2006.01); G02F 1/19 (2019.01)
CPC G02F 1/19 (2013.01) 20 Claims
OG exemplary drawing
 
1. A meta-structure comprising:
a lower electrode;
a lower insulating layer on the lower electrode;
a lower metal oxide layer on the lower insulating layer;
a lower metal layer on the lower metal oxide layer;
a middle metal oxide layer on the lower metal layer;
an upper metal layer on the middle metal oxide layer;
an upper metal oxide layer on the upper metal layer;
an upper insulating layer on the upper metal oxide layer; and
antenna electrodes on the upper insulating layer.