US 12,436,416 B1
Optics ring modulator including grating pillar
Wanjun Wang, Singapore (SG); Xiaoguang Tu, Singapore (SG); and Masaki Kato, Palo Alto, CA (US)
Assigned to Marvell Asia Pte Ltd, Singapore (SG)
Filed by Marvell Asia Pte Ltd., Singapore (SG)
Filed on Jul. 21, 2023, as Appl. No. 18/224,700.
Claims priority of provisional application 63/391,408, filed on Jul. 22, 2022.
Int. Cl. G02F 1/025 (2006.01); G02B 6/12 (2006.01)
CPC G02F 1/025 (2013.01) [G02B 2006/12142 (2013.01); G02F 2201/063 (2013.01); G02F 2203/15 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A silicon photonics modulator comprising:
a substrate;
a PN junction disposed on the substrate, the PN junction formed by a first L-shaped region doped with a p-type doping abutting a second L-shaped region doped with an n-type doping;
a first plurality of regions doped with the p-type doping arranged adjacent to the first L-shaped region on the substrate, the first plurality of regions each having different doping concentrations which are greater than a doping concentration of the first L-shaped region;
a second plurality of regions doped with the n-type doping arranged adjacent to the second L-shaped region on the substrate, the second plurality of regions each having different doping concentrations which are greater than a doping concentration of the second L-shaped region;
a first electrical contact disposed on one of the first plurality of regions having the highest p-type doping;
a second electrical contact disposed on one of the second plurality of regions having the highest n-type doping; and
multiple grating pillars disposed on at least one of the first plurality of regions or the second plurality of regions, each of the multiple grating pillars doped with the n-type doping or the p-type doping, and each of the multiple grating pillars spaced apart from the first and second L-shaped regions and spaced apart from one another, wherein the multiple grating pillars are configured to decrease electrical resistance between the first electrical contact and the second electrical contact.