US 12,436,401 B2
Polarization optical system
Boris Golberg, Ashdod (IL); Haim Feldman, Nof-Ayalon (IL); Avishai Bartov, Hod Hasharon (IL); and Ron Naftali, Shoham (IL)
Assigned to Applied Materials Israel Ltd., Rehovot (IL)
Filed by Applied Materials Israel Ltd., Rehovot (IL)
Filed on Jan. 31, 2023, as Appl. No. 18/104,230.
Prior Publication US 2024/0255770 A1, Aug. 1, 2024
Int. Cl. G02B 27/28 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G02F 1/13363 (2006.01)
CPC G02B 27/283 (2013.01) [G01N 21/8806 (2013.01); G01N 21/95 (2013.01); G02F 1/13363 (2013.01); G02B 2207/117 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A polarizer system comprising:
(a) at least one polarization beam splitter positioned to receive input radiation beam and to split the input radiation beam directing a first beam portion having a first linear polarization orientation along a first path and a second beam portion having a second linear polarization orientation orthogonal to said first linear polarization orientation along a second path;
(b) a polarization rotator located along said second path and configured to rotate the polarization of said first beam portion to be parallel to said first linear polarization orientation;
(c) a beam combiner configured and positioned to combine said first and second beam portions to form a common beam having said first linear polarization orientation propagating along a selected optical path; and
(d) a delay unit positioned in at least one of the first path or the second path to temporally align radiation pulses of said first and second beam portions forming two pulses associated with the first and second beam portions.