US 12,436,381 B2
Scanning device for scanning a scanning field, and method for operating said device
Jörg Steinert, Jena (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Mar. 11, 2024, as Appl. No. 18/601,854.
Claims priority of application No. 10 2023 202 296.6 (DE), filed on Mar. 14, 2023.
Prior Publication US 2024/0310624 A1, Sep. 19, 2024
Int. Cl. G01S 7/48 (2006.01); G02B 26/10 (2006.01); G01S 7/481 (2006.01)
CPC G02B 26/101 (2013.01) [G02B 26/105 (2013.01); G01S 7/4817 (2013.01)] 7 Claims
OG exemplary drawing
 
1. Scanning device for scanning a scan field, comprising
a first scanner and a second scanner,
each with a frame that is movable about a first oscillation axis and, held in said frame, a scanning mirror that can be excited resonantly to vibrate about a second oscillation axis,
wherein the scanners are arranged in a beam path and imaged onto one another;
and their respective spatial and temporal alignment are matched to one another by means of a controller and by means of drives of the scanners connected therewith, for the purpose of scanning the scan field;
wherein
each scanner is a 2-axis scanner whose respective first oscillation axis is directed orthogonally to the respective second oscillation axis.