US 12,436,334 B2
Photonics chip structures including a light source and an edge coupler
Arpan Dasgupta, Beacon, NY (US); Zahidur Chowdhury, New Windsor, NY (US); Takako Hirokawa, Ballston Lake, NY (US); Vaishnavi Karra, Hopewell Junction, NY (US); and Norman Robson, Fishkill, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on May 1, 2023, as Appl. No. 18/141,753.
Prior Publication US 2024/0369760 A1, Nov. 7, 2024
Int. Cl. G02B 6/12 (2006.01); F21V 8/00 (2006.01); G02B 6/136 (2006.01); H04N 5/33 (2023.01)
CPC G02B 6/12004 (2013.01) [G02B 6/0016 (2013.01); G02B 6/136 (2013.01); H04N 5/33 (2013.01); G02B 2006/12121 (2013.01); G02B 2006/12147 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for a photonics chip, the structure comprising:
a semiconductor substrate;
a back-end-of-line stack on the semiconductor substrate, the back-end-of-line stack including a first dielectric layer, a first plurality of metal features in the first dielectric layer, a second dielectric layer on the first dielectric layer, and a second plurality of metal features in the second dielectric layer, the second plurality of metal features having a non-overlapping relationship with the first plurality of metal features;
an edge coupler adjacent to the first plurality of metal features and the second plurality of metal features; and
a light source configured to supply light to the edge coupler, the light source having a light output,
wherein the edge coupler is positioned between the light source and the first plurality of metal features, the second plurality of metal features are positioned between the edge coupler and the first plurality of metal features, the first plurality of metal features and the second plurality of metal features are configured to redirect a portion of the light from the light source out of the photonics chip for detection, and the first plurality of metal features and the second plurality of metal features are configured to redirect the portion of the light as a function of an alignment between the light output and the edge coupler.