US 12,436,327 B2
Optical filter
Scott Rowlands, Santa Rosa, CA (US); Georg J. Ockenfuss, Santa Rosa, CA (US); Tim Gustafson, Santa Rosa, CA (US); and Marius Grigonis, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., Chandler, AZ (US)
Filed on May 5, 2023, as Appl. No. 18/312,831.
Application 18/312,831 is a continuation of application No. 16/722,325, filed on Dec. 20, 2019, granted, now 11,650,361.
Claims priority of provisional application 62/785,487, filed on Dec. 27, 2018.
Prior Publication US 2023/0324592 A1, Oct. 12, 2023
Int. Cl. G02B 5/20 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 14/10 (2006.01); C23C 14/34 (2006.01); C23C 28/00 (2006.01); G02B 1/00 (2006.01); G02B 1/115 (2015.01)
CPC G02B 5/208 (2013.01) [C23C 14/0694 (2013.01); C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/10 (2013.01); C23C 14/34 (2013.01); C23C 28/345 (2013.01); G02B 1/007 (2013.01); G02B 1/115 (2013.01); G02B 5/20 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical filter, comprising:
a first layer including a first material,
the first material including at least silicon and hydrogen;
a second layer including a second material that is different from the first material,
the second material including an oxide, and
the second layer being adjacent to the first layer;
a third layer including a third material that is different from the first material and the second material,
the third material including at least tantalum, and
the third layer being adjacent to the second layer; and
a fourth layer including the second material,
the second material in the fourth layer being adjacent to the third layer.