US 12,436,241 B2
Laser scanner using macro scanning structure and a MEMS scanning mirror
Andreas Hofbauer, Zwettl (AT); Marcus Edward Hennecke, Graz (AT); Boris Kirillov, Judendorf-Straßenge (AT); and Rainer Reichert, Horn (AT)
Assigned to Infineon Technologies Austria AG, Villach (AT)
Filed by Infineon Technologies Austria AG, Villach (AT)
Filed on Dec. 1, 2021, as Appl. No. 17/539,404.
Prior Publication US 2023/0168349 A1, Jun. 1, 2023
Int. Cl. G01S 7/481 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC G01S 7/4817 (2013.01) [G02B 26/0833 (2013.01); G02B 26/101 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A light scanning system, comprising:
a transmitter configured to transmit a transmit light beam along a transmission path;
a microelectromechanical system (MEMS) mirror arranged on the transmission path and configured to oscillate about a first scanning axis to steer the transmit light beam in a first dimension of a field of view;
a macro scanner arranged on the transmission path and on a receiver path, the macro scanner configured to rotate about a second scanning axis to steer the transmit light beam in a second dimension of the field of view, wherein the macro scanner is further configured to receive from the field of view a receive light beam that is produced from the transmit light beam via backscattering, and wherein the macro scanner is configured to direct the receive light beam further along the receiver path;
a photodetector arranged on the receiver path and configured to receive the receive light beam from the macro scanner and generate a measurement signal representative of the receive light beam; and
a receiver mirror arranged on the receiver path between the macro scanner and the photodetector, wherein the receiver mirror is configured to receive the receive light beam from the macro scanner and direct the receive light beam at the photodetector.