US 12,436,183 B2
Tray elevating and lowering apparatus of test handler
Jin Ho Kang, Cheonan-si (KR); and Joo Hyun Seo, Cheonan-si (KR)
Assigned to SEMES CO., LTD., Cheonan-si (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Jul. 21, 2022, as Appl. No. 17/870,047.
Claims priority of application No. 10-2021-0096690 (KR), filed on Jul. 22, 2021.
Prior Publication US 2023/0024139 A1, Jan. 26, 2023
Int. Cl. G01R 31/28 (2006.01); G06F 3/01 (2006.01); G06F 3/0346 (2013.01); H01L 21/673 (2006.01); H01L 21/687 (2006.01)
CPC G01R 31/2867 (2013.01) [G01R 31/2874 (2013.01); G01R 31/2887 (2013.01); G01R 31/2893 (2013.01); G01R 31/2896 (2013.01); G06F 3/011 (2013.01); G06F 3/0346 (2013.01); H01L 21/67303 (2013.01); H01L 21/68792 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A tray elevator of a test handler comprising:
a tray mounter on which a test tray is seated and having a support part and a through hole vertically penetrating the support part;
a shaft vertically extending through the through hole of the tray mounter and configured to provide a path for elevating or lowering the tray mounter;
a guide bushing including an outer surface and a groove at the outer surface, inserted into the through hole of the tray mounter, and configured to move along the shaft;
a ring inserted into the groove of the guide bushing; and
an inner side bushing inserted into an inside of the guide bushing and contacting the shaft,
wherein the guide bushing and the inner side bushing each have a “C” shape having a partially open portion.