US 12,436,182 B2
Measurement pattern, measurement pattern set, calculation method, non-transitory computer-readable recording medium and calculation device
Ken Kikuchi, Osaka (JP)
Assigned to Sumitomo Electric Industries, Ltd., Osaka (JP)
Filed by Sumitomo Electric Industries, Ltd., Osaka (JP)
Filed on Nov. 1, 2023, as Appl. No. 18/499,531.
Claims priority of application No. 2022-180761 (JP), filed on Nov. 11, 2022.
Prior Publication US 2024/0159817 A1, May 16, 2024
Int. Cl. G01R 31/26 (2020.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01); H01L 27/088 (2006.01)
CPC G01R 31/2621 (2013.01) [G01R 1/06772 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A measurement pattern for measuring a high frequency characteristic of a first element, the first element including a first input electrode to which a high frequency signal is input, a first output electrode from which the high frequency signal is output, and a first reference electrode to which a reference potential is supplied, which overlaps with the first input electrode and the first output electrode when viewed from a first direction, and which has a planar shape that is non-linearly symmetric with respect to any virtual straight lines extending in the first direction, the measurement pattern comprising:
a second element including:
a second input electrode having a planar shape corresponding to a planar shape of the first input electrode in at least a partial region of the first element in a second direction orthogonal to the first direction;
a second output electrode having a planar shape corresponding to a planar shape of the first output electrode in the at least partial region; and
a second reference electrode overlapping the second input electrode and the second output electrode when viewed from the first direction and having a planar shape that is linearly symmetric with respect to a virtual straight line extending in the first direction;
an input pad connected to the second input electrode;
an output pad connected to the second output electrode so as to dispose the second input electrode and the second output electrode between the input pad and the output pad in the second direction; and
a reference pad connected to the second reference electrode, provided from the input pad to the output pad when viewed from the first direction, and having a planar shape that is linearly symmetric with respect to the virtual straight line.