| CPC G01R 19/225 (2013.01) [F24D 11/0207 (2013.01); G01R 19/16519 (2013.01); G01R 19/257 (2013.01); H01L 21/67115 (2013.01); H05B 1/0233 (2013.01); Y02B 30/17 (2018.05)] | 19 Claims |

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1. A control system for controlling an output voltage provided to a
heater, the control system comprising:
a controller configured to:
determine an input parameter based on an electrical characteristic of the heater, wherein the heater includes a resistive heating element that is operable to emit heat and operable as a sensor, wherein the input parameter includes data indicative of a temperature of the resistive heating element that is determined based on the electrical characteristic, wherein the heater is configured to operate in a plurality of operational states comprising a start-up mode, a soft-start mode, a rate mode, and a hold mode,
determine an operational state of the heater to be at least one of the start-up mode, the soft-start mode, the rate mode, and the hold mode based on the input parameter, wherein each of the start-up mode, the soft-start mode, the rate mode, and the hold mode has one or more unique settings to create a programmable state machine, wherein the start-up mode is a mode in which power is being supplied to measure voltage and current, the soft-start mode is a mode in which the power is increased at a ramp rate until a specific resistance setpoint is passed, the rate mode is a mode in which the temperature is increased at a ramp rate selected based on a material of the heater, and the hold mode is a mode in which the temperature of the heater is controlled to a specific setpoint,
determine the output voltage for the heater based on the input parameter and a desired setpoint using the programmable state machine, wherein the desired setpoint is based on the operational state of the heater,
transmit a signal to a power converter to generate the output voltage, and control the heater based on the signal to the power converter.
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