US 12,436,168 B2
Physical quantity sensor and inertial measurement unit
Shota Kigure, Matsumoto (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Mar. 28, 2023, as Appl. No. 18/191,131.
Claims priority of application No. 2022-053524 (JP), filed on Mar. 29, 2022.
Prior Publication US 2023/0314465 A1, Oct. 5, 2023
Int. Cl. G01P 15/125 (2006.01); G01P 15/08 (2006.01)
CPC G01P 15/125 (2013.01) [G01P 2015/0831 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A physical quantity sensor comprising:
when directions orthogonal to one another being defined as a first direction, a second direction, and a third direction,
a substrate;
a first fixed electrode and a second fixed electrode provided on a surface of the substrate, each of the first and second fixed electrodes extending along the second direction, the first fixed electrode and the second fixed electrode being spaced apart along the first direction;
a first movable body provided to be swingable with respect to the substrate about a first rotation axis of a first beam, the first rotation axis extending along the second direction, the first movable body facing the first fixed electrode and the second fixed electrode along the third direction;
a second movable body provided to be swingable with respect to the substrate about a second rotation axis of a second beam, the second rotation axis extending along the second direction, the second movable body facing the first fixed electrode and the second fixed electrode along the third direction, the first movable body being spaced apart from the second movable body along the second direction via a border; and
a shield plate provided at the border, the shield plate being directly adjacent to each of the first and second movable bodies, wherein
the first rotation axis is disposed between the first fixed electrode and the second fixed electrode in a plan view along the third direction,
the second rotation axis is disposed between the first fixed electrode and the second fixed electrode in the plan view, and
the shield plate completely overlaps the first and second movable bodies and the first and second beams in a stationary state of the physical quantity sensor when viewed along the second direction.