| CPC G01P 15/125 (2013.01) [G01P 15/135 (2013.01); G01P 15/18 (2013.01); G01P 2015/0828 (2013.01); G01P 2015/0831 (2013.01)] | 12 Claims |
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1. A physical quantity sensor comprising:
a substrate that is plate-shaped, the substrate having four sides along either a first direction or a second direction, the first and second directions being two of three directions orthogonal to one another represented as the first direction, the second direction, and a third direction;
a first pair of fixed electrode sections and a second pair of fixed electrode sections provided on the substrate, each of the first and second pairs of fixed electrode sections extending along the second direction;
a first pair of electrode fixes sections and a second pair of electrode fixed sections fixing the first and second pairs of fixed electrode sections to the substrate at ends of the first and second pairs of fixed electrode sections, respectively;
a first movable monolithic body including a first movable electrode section, a
first support beam, a first extending section, and a first coupling section, each of the first movable electrode section and the first support beam extending along the second direction; and
a second movable monolithic body including a second movable electrode
section, a second support beam, a second extending section, and a second coupling section, each of the second movable electrode section and the second support beam extending along the second direction,
wherein the first and second pairs of fixed electrode sections and the first and second movable monolithic bodies are laterally spaced apart from one another in a plan view when viewed along the third direction orthogonal to the substrate,
a movable electrode of the first movable electrode section is laterally overlapped with a fixed electrode of each of the first pair of fixed electrode sections on a first plane extending along the first direction and the second direction,
a movable electrode of the second movable electrode section is laterally overlapped with a fixed electrode of each of the second pair of fixed electrode sections on the first plane,
first and second fixed sections fix the first and second movable monolithic bodies to the substrate, respectively,
one end of the first support beam is coupled to the first fixed section,
the first coupling section is configured to couple another end of the first support beam and the first movable electrode section,
the first extending section extends from at an intermediate point of the first coupling section along the second direction, and the first extending section is located directly adjacent to one of the first pair of fixed electrode sections,
one end of the second support beam is coupled to the second fixed section,
the second coupling section is configured to couple another end of the second support beam and the second movable electrode section,
the second extending section extends from at an intermediate point of the second coupling section along the second direction, and the second extending section is located directly adjacent to one of the second pair of fixed electrode sections,
in the plane view in the third direction, the first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section are disposed side by side in the first direction in order of the first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section,
wherein the first pair of fixed electrode sections includes a first fixed electrode section, and the second pair of fixed electrode sections includes a second fixed electrode section,
the substrate has a center line passing through a center thereof and extending along the first direction,
the first and second fixed sections are laterally spaced apart from the center line in opposite directions along the second direction toward different sides of the substrate, and
the first and second pairs of electrode fixed sections are located closer to at least two sides of the four sides of the substrate than the first and second fixed sections, respectively.
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