US 12,436,109 B2
Substrate inspection device and substrate inspection method using the same
Sung Hune Yoo, Yongin-si (KR); and Dongwook Lee, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Aug. 15, 2023, as Appl. No. 18/449,767.
Claims priority of application No. 10-2022-0179179 (KR), filed on Dec. 20, 2022.
Prior Publication US 2024/0201100 A1, Jun. 20, 2024
Int. Cl. G01N 21/88 (2006.01); G01N 21/84 (2006.01); G01N 21/95 (2006.01)
CPC G01N 21/8851 (2013.01) [G01N 21/8422 (2013.01); G01N 21/9515 (2013.01); G01N 2021/8427 (2013.01); G01N 2021/8887 (2013.01); G01N 2021/8896 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate inspection device comprising:
an imaging part that is disposed in a chamber and obtains an input image by photographing a substrate coated with a solution; and
an analysis part that converts brightness data of the input image into grayscale data and analyzes a film shape of a pixel region based on the grayscale data.