US 12,436,097 B2
Spectroscopic measurement device
Masahiro Watanabe, Tokyo (JP); Kaifeng Zhang, Tokyo (JP); Shuichi Baba, Tokyo (JP); and Takenori Hirose, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/270,880
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Nov. 2, 2021, PCT No. PCT/JP2021/040468
§ 371(c)(1), (2) Date Jul. 5, 2023,
PCT Pub. No. WO2022/185615, PCT Pub. Date Sep. 9, 2022.
Claims priority of application No. 2021-033537 (JP), filed on Mar. 3, 2021.
Prior Publication US 2024/0060880 A1, Feb. 22, 2024
Int. Cl. G01N 21/35 (2014.01); G02B 21/06 (2006.01); G02B 21/26 (2006.01)
CPC G01N 21/35 (2013.01) [G02B 21/06 (2013.01); G02B 21/26 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/105 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A spectroscopic measurement device, comprising:
a stage on which a sample is to be placed;
an energy source configured to generate an energy beam to be emitted to a predetermined region of the sample;
an electromagnetic wave source configured to generate an electromagnetic wave to be emitted to the sample;
an objective lens configured to focus the electromagnetic wave in the predetermined region;
two confocal detectors configured to detect the electromagnetic wave reflected by the sample; and
a central processing unit (CPU) programmed to calculate, based on each of outputs of the confocal detectors, a change in a physical property value of the sample when the energy beam is emitted to the predetermined region.