US 12,436,096 B2
Ultraviolet inspection tool and inspection method using a visual indicator
Kimi Ikeda, Shizuoka (JP); Sotaro Inomata, Shizuoka (JP); and Yusuke Sakai, Shizuoka (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Sep. 13, 2023, as Appl. No. 18/465,992.
Application 18/465,992 is a continuation of application No. PCT/JP2022/010597, filed on Mar. 10, 2022.
Claims priority of application No. 2021-047379 (JP), filed on Mar. 22, 2021; and application No. 2021-080384 (JP), filed on May 11, 2021.
Prior Publication US 2023/0417658 A1, Dec. 28, 2023
Int. Cl. G01N 21/33 (2006.01); G01N 21/31 (2006.01)
CPC G01N 21/33 (2013.01) [G01N 21/314 (2013.01); G01N 2021/3166 (2013.01); G01N 2021/3181 (2013.01); G01N 2223/612 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An inspection tool comprising:
a first display portion; and
a second display portion,
wherein the first display portion is a display portion which indicates a visual change before and after irradiation of the inspection tool with light having at least any of wavelengths in a wavelength range of 200 to 280 nm, and
the second display portion is a display portion which does not indicate a visual change before and after irradiation of the inspection tool with light in a wavelength range of 200 to 230 nm, but indicates a visual change before and after irradiation of the inspection tool with light having at least any of wavelengths in a wavelength range of more than 230 nm and 280 nm or less,
wherein the second display portion includes a filter and a photosensitive portion,
the filter is disposed to cover a part of a region on a surface of the photosensitive portion, the filter shields light in the wavelength range of 200 to 230 nm and passes light having at least any of wavelengths in the wavelength range of more than 230 nm and 280 nm or less, and
the photosensitive portion indicates a visual change before and after receiving light having at least any of wavelengths in the wavelength range of more than 230 nm and 280 nm or less.