US 12,436,052 B2
Method for forming a pathway in a pressure sensor having a glass to metal seal
Jonathan Gordon Koehler, Chanhassen, MN (US); and Eric Paul Petersen, Minnetonka, MN (US)
Assigned to ROSEMOUNT INC., Shakopee, MN (US)
Filed by Rosemount Inc., Shakopee, MN (US)
Filed on Jan. 12, 2023, as Appl. No. 18/153,586.
Prior Publication US 2024/0241005 A1, Jul. 18, 2024
Int. Cl. G01L 9/12 (2006.01); G01L 9/00 (2006.01); G01L 13/02 (2006.01)
CPC G01L 13/025 (2013.01) [G01L 9/0072 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of manufacturing a pressure sensor for sensing a pressure of a process fluid, comprising:
obtaining a sensor body having a sensor cavity formed therein;
placing a metal tube through an opening in the sensor body into the sensor cavity;
placing a rod through the metal tube and into the sensor cavity;
at least partially filling the sensor cavity with a dielectric material, wherein the dielectric material completely covers the metal tube carried in the sensor cavity and a portion of the rod;
removing the rod and forming a dielectric passageway fluidically coupled to the metal tube; and
sealing the sensor cavity with a deflectable diaphragm configured to deflect in response to applied pressure from the process fluid.