US 12,436,049 B2
Sensor die with a diaphragm
Jeffrey C. Fong, Fremont, CA (US); and Daniel T. O'Brien, Fremont, CA (US)
Filed by TE Connectivity Solutions GmbH, Schaffhausen (CH)
Filed on Feb. 16, 2023, as Appl. No. 18/169,939.
Prior Publication US 2024/0280425 A1, Aug. 22, 2024
Int. Cl. G01L 9/00 (2006.01)
CPC G01L 9/0052 (2013.01) 19 Claims
OG exemplary drawing
 
1. A sensor die, comprising:
a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm, the diaphragm includes a first layer and a second layer disposed on the first layer, the first membrane is formed of the first layer and the second layer, and the second membrane is formed of the second layer, the first layer has a diaphragm cavity extending into the first layer, the first layer includes a silicon and an oxide disposed on the silicon, the diaphragm cavity is formed in the oxide of the first layer.