US 12,436,034 B2
Ferroelectric sensor
Sandro Kappert, Graz (AT); Stefan Sax, Graz (AT); and Johann Pichler, Breitenau am Hochlantsch (AT)
Assigned to TDK Electronics AG, Munich (DE)
Appl. No. 17/611,016
Filed by TDK Electronics AG, Munich (DE)
PCT Filed May 15, 2020, PCT No. PCT/EP2020/063664
§ 371(c)(1), (2) Date Nov. 12, 2021,
PCT Pub. No. WO2020/229674, PCT Pub. Date Nov. 19, 2020.
Claims priority of application No. 10 2019 112 771.8 (DE), filed on May 15, 2019.
Prior Publication US 2022/0228921 A1, Jul. 21, 2022
Int. Cl. G01J 5/34 (2022.01); G01L 1/16 (2006.01); G01R 27/26 (2006.01); H10N 30/00 (2023.01); H10N 30/03 (2023.01); H10N 30/50 (2023.01); H10N 30/85 (2023.01); H10N 30/857 (2023.01); H10N 30/88 (2023.01); B25J 19/02 (2006.01)
CPC G01J 5/34 (2013.01) [G01L 1/16 (2013.01); G01R 27/2605 (2013.01); H10N 30/03 (2023.02); H10N 30/101 (2024.05); H10N 30/50 (2023.02); H10N 30/852 (2023.02); H10N 30/857 (2023.02); H10N 30/88 (2023.02); B25J 19/028 (2013.01)] 33 Claims
OG exemplary drawing
 
1. A sensor comprising:
a first electrode;
a ferroelectric layer;
a second electrode, wherein the second electrode is connected to ground and the ferroelectric layer is arranged between the first and second electrodes; and
a carrier material and at least one mechanical amplifier element,
wherein the at least one mechanical amplifier element is arranged on at least one of the first electrode, the second electrode or the carrier material, and
wherein the at least one mechanical amplifier element is an extension of the first electrode and/or the carrier material in an axial direction.