US 12,436,031 B2
Integrated multi-parameter sensor based on optoelectronic integration and fabrication method thereof
Shan Wang, Hangzhou (CN); Xiaoyu Wang, Hangzhou (CN); Qi Wang, Hangzhou (CN); and Lei Zhang, Hangzhou (CN)
Assigned to ZHEJIANG LAB, Hangzhou (CN)
Filed by ZHEJIANG LAB, Hangzhou (CN)
Filed on May 29, 2025, as Appl. No. 19/221,599.
Application 19/221,599 is a continuation of application No. PCT/CN2023/104859, filed on Jun. 30, 2023.
Claims priority of application No. 202310512850.9 (CN), filed on May 9, 2023.
Prior Publication US 2025/0290798 A1, Sep. 18, 2025
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); G01R 27/26 (2006.01)
CPC G01J 3/0218 (2013.01) [G01J 3/28 (2013.01); G01R 27/2605 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An integrated multi-parameter sensor based on optoelectronic integration, comprising:
a flexible optical waveguide and a flexible interdigitated electrode film wound around an outer surface of the flexible optical waveguide, wherein the flexible optical waveguide is formed by inserting two optical fibers into a silicone tube, with the two optical fibers spaced apart from each other at a predetermined distance; and the flexible interdigitated electrode film comprises a flexible substrate and poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) interdigitated electrodes printed on the flexible substrate;
the flexible optical waveguide is formed by inserting the two optical fibers into two ends of a same silicone tube, with ends of the two optical fibers spaced apart from each other at the predetermined distance in the silicone tube;
the two optical fibers are coupled to an external optical spectrometer via an optical fiber adapter for light intensity change signal acquisition; two electrodes of the flexible interdigitated electrode film are each electrically connected to an external capacitance acquisition circuit by flexible interdigitated electrode leads; and two terminals of one of the two electrodes are each electrically connected to an external resistance acquisition circuit by flexible interdigitated electrode leads; and
the capacitance acquisition circuit acquires a capacitance signal of a fringing electric field between two flexible interdigitated electrode leads that connect the electrodes to the capacitance acquisition circuit.