US 12,436,030 B2
Detector for detecting electromagnetic radiation, image sensor, and method for detecting image information
Jan Genoe, Testelt (BE); Robert Gehlhaar, Herent (BE); and Kristiaan De Greve, Heverlee (BE)
Assigned to IMEC VZW, Leuven (BE)
Appl. No. 18/004,368
Filed by IMEC VZW, Leuven (BE)
PCT Filed Jun. 11, 2021, PCT No. PCT/EP2021/065808
§ 371(c)(1), (2) Date Jan. 5, 2023,
PCT Pub. No. WO2022/017681, PCT Pub. Date Jan. 27, 2022.
Claims priority of application No. 20186876 (EP), filed on Jul. 21, 2020.
Prior Publication US 2023/0280208 A1, Sep. 7, 2023
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); H10F 39/00 (2025.01)
CPC G01J 3/0216 (2013.01) [G01J 3/2803 (2013.01); G01J 3/2823 (2013.01); H10F 39/806 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A detector for detecting electromagnetic radiation spanning a range from a first wavelength to a second wavelength, wherein the first wavelength is a shortest wavelength in the range and the second wavelength is a longest wavelength in the range, and wherein the detector comprises:
an array of funnel elements for propagating electromagnetic radiation from a second plane towards a first plane, wherein each of the funnel elements comprises an entrance end and an exit end, wherein the entrance ends of the array of funnel elements define the second plane, wherein each of the entrance ends has a size larger than half of the second wavelength of electromagnetic radiation in a medium from which the electromagnetic radiation enters the detector, wherein each of the funnel elements is configured to:
capture electromagnetic radiation in focus at the second plane at the entrance end;
propagate the electromagnetic radiation that is in focus at the second plane to the exit end; and
allow electromagnetic radiation that is in focus at the first plane to pass the entrance end and propagate to the first plane without influence by the funnel element, and
wherein each of the exit ends has a size smaller than half of the first wavelength of electromagnetic radiation in the medium; and
an array of photosensitive elements for detecting electromagnetic radiation incident on the array of photosensitive elements, wherein each funnel element is associated with a photosensitive element such that image information corresponding to electromagnetic radiation being in focus at the second plane is detected by the array of photosensitive elements, and wherein the array of photosensitive elements defines the first plane and is configured to further capture image information corresponding to electromagnetic radiation that is in focus at the first plane.