US 12,435,973 B2
Shape measuring system
Yoshitaka Miyatani, Tokyo (JP); Tatsuji Ashitani, Kanagawa (JP); and Ryuta Okamoto, Kanagawa (JP)
Assigned to Sony Semiconductor Solutions Corporation, Kanagawa (JP)
Appl. No. 18/247,563
Filed by Sony Semiconductor Solutions Corporation, Kanagawa (JP)
PCT Filed Oct. 8, 2021, PCT No. PCT/JP2021/037286
§ 371(c)(1), (2) Date Mar. 31, 2023,
PCT Pub. No. WO2022/102302, PCT Pub. Date May 19, 2022.
Claims priority of application No. 2020-187476 (JP), filed on Nov. 10, 2020.
Prior Publication US 2024/0019244 A1, Jan. 18, 2024
Int. Cl. G01B 11/25 (2006.01); G01B 11/24 (2006.01); H04N 25/47 (2023.01); H04N 25/701 (2023.01)
CPC G01B 11/2518 (2013.01) [G01B 11/24 (2013.01); G01B 11/2545 (2013.01); H04N 25/47 (2023.01); H04N 25/701 (2023.01)] 9 Claims
OG exemplary drawing
 
1. A shape measuring system comprising:
a light source part that emits measurement light to a measurement target;
a light receiving part that receives reflected light that is the measurement light reflected from the measurement target;
a signal processor configured to calculate a three-dimensional shape of the measurement target on a basis of event data generated from the reflected light reflected by the measurement target and incident on the light receiving part and to remove an unwanted signal generated when unwanted light other than the reflected light is incident on the light receiving part from an outside; and
a scan mechanism that sweep-scans the measurement target with the measurement light projected from the light source part to the measurement target by moving the light source part or the measurement target, wherein
the scan mechanism is provided in the light source part,
the light source part includes a light source and a waveform control lens that performs waveform control of light from the light source,
the light receiving part includes a light receiving lens, an event-based vision sensor (EVS), which is an asynchronous imaging element that captures a temporal change of reflected light passing through the light receiving lens among beams of the reflected light and outputs an event signal, an event issuing part that detects an event on a basis of output data from the EVS and outputs event data, and a transmitting part that outputs the event data to the signal processor,
the light source part is a single light source part, and
a first light receiving part and a second light receiving part whose positions are shifted from each other are provided as the light receiving part.