US 12,435,972 B2
Surface measurement apparatus and surface measurement method
Atsuhiro Hibi, Tokyo (JP); Yusuke Konno, Tokyo (JP); Nobuhiro Furuya, Tokyo (JP); and Akihito Nakazaki, Tokyo (JP)
Assigned to NIPPON STEEL CORPORATION, Tokyo (JP)
Appl. No. 17/609,341
Filed by NIPPON STEEL CORPORATION, Tokyo (JP)
PCT Filed Mar. 31, 2020, PCT No. PCT/JP2020/014861
§ 371(c)(1), (2) Date Nov. 5, 2021,
PCT Pub. No. WO2021/199299, PCT Pub. Date Oct. 7, 2021.
Prior Publication US 2022/0146254 A1, May 12, 2022
Int. Cl. G01B 11/25 (2006.01)
CPC G01B 11/25 (2013.01) 6 Claims
OG exemplary drawing
 
1. A surface measurement apparatus that measures a surface of an object to be measured moving in a predetermined moving direction on a plane or a surface of an object to be measured moving in a predetermined moving direction along a curved surface of a roll, the surface being along the curved surface, the apparatus comprising:
N (N being an integer of two or more) light sources provided in a width direction, the light sources each emitting line beam over the width direction, which is a direction perpendicular to the moving direction;
a screen on which reflected images of N pieces of the line beam reflected on reflection regions of the surface of the object to be measured respectively are projected;
an image capturing device that captures the reflected image projected on the screen and acquires a captured image; and
an arithmetic processing device that measures the surface of the object to be measured by using the captured image, wherein
the N light sources are arranged so as to make at least incident angles of the line beams adjacent in the width direction on the surface of the object to be measured same,
the N light sources are arranged so as to make positions of the reflection regions on the surface of the object to be measured in the moving direction different, and
the N light sources are arranged so as to make each reflection region that is projected in which the reflection region on the surface of the object to be measured is projected in the moving direction of the object to be measured overlap an adjacent reflection region that is projected in the width direction of the object to be measured.