US 12,435,963 B2
Apparatus and method for controlling edge ring variation
Sathyendra Ghantasala, Fremont, CA (US); Leonid Dorf, San Jose, CA (US); Evgeny Kamenetskiy, Santa Clara, CA (US); Peter Muraoka, Santa Clara, CA (US); Denis Martin Koosau, Sunnyvale, CA (US); Rajinder Dhindsa, Pleasanton, CA (US); and Andreas Schmid, Meyriez (CH)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 15, 2023, as Appl. No. 18/317,776.
Application 18/317,776 is a division of application No. 17/161,271, filed on Jan. 28, 2021, granted, now 11,668,553.
Claims priority of provisional application 62/976,805, filed on Feb. 14, 2020.
Prior Publication US 2023/0280150 A1, Sep. 7, 2023
Int. Cl. G01B 7/06 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC G01B 7/08 (2013.01) [H01J 37/32642 (2013.01); H01L 21/67069 (2013.01); H01L 21/68721 (2013.01); H01J 2237/24564 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An apparatus for measuring a ring capacitance, the apparatus comprising:
a clamp configured to contact an inner surface and an outer surface of a ring, the clamp having a body, the body comprising:
a first end having a first hole;
a second end having a second hole; and
a middle portion there between the first end and second end, the middle portion having a third hole;
a first positioning member disposed in the first hole;
a second positioning member extending through the third hole;
a first electrode coupled to the first positioning member;
a conductive member configured to support the ring along a top surface of the ring;
a support surface supporting the conductive member; and
a measuring device coupled to the conductive member and the first electrode, the measuring device configured to measure a capacitance of the ring.