US 12,435,798 B2
Diaphragm valve and flow rate control device
Kohei Shigyou, Osaka (JP); Takashi Hirose, Osaka (JP); Takahiro Matsuda, Osaka (JP); and Kazunari Watanabe, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Appl. No. 18/576,172
Filed by FUJIKIN INCORPORATED, Osaka (JP)
PCT Filed Jun. 8, 2022, PCT No. PCT/JP2022/023054
§ 371(c)(1), (2) Date Jan. 3, 2024,
PCT Pub. No. WO2023/032393, PCT Pub. Date Mar. 9, 2023.
Claims priority of application No. 2021-141486 (JP), filed on Aug. 31, 2021.
Prior Publication US 2024/0229941 A1, Jul. 11, 2024
Int. Cl. F16K 7/14 (2006.01); F16K 27/02 (2006.01); F16K 31/00 (2006.01)
CPC F16K 7/14 (2013.01) [F16K 27/0236 (2013.01); F16K 31/007 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A diaphragm valve comprising:
a body having a block shape and defining a flow path;
a diaphragm provided on a bottom surface of an accommodation recess formed in the body and configured to change an opening degree of the flow path while defining a part of the flow path;
a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body;
a stacked piezoelectric actuator incorporating a stack of piezoelectric elements in a cylindrical casing;
a support plate for supporting the stacked piezoelectric actuator;
a cylindrical actuator cover holding a diaphragm presser and configured to transmit a piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside;
a fixing member screwed with a screw portion common to the screw portion and cooperating with the fixing ring to fix a position of the support plate in the accommodation recess.