US 12,435,409 B2
Apparatus, method and system for coating a substrate, in particular a superconducting tape conductor and coated superconducting tape conductor
Georg Sigl, Neubiberg (DE)
Assigned to THEVA DÜNNSCHICHTTECHNIK GMBH, Ismaning (DE)
Filed by Theva Dünnschichttechnik GmbH, Ismaning (DE)
Filed on Jul. 31, 2020, as Appl. No. 16/945,430.
Claims priority of application No. 19194710 (EP), filed on Aug. 30, 2019.
Prior Publication US 2021/0062328 A1, Mar. 4, 2021
Int. Cl. C23C 14/56 (2006.01); B05C 5/02 (2006.01); C23C 14/22 (2006.01); H01B 12/06 (2006.01)
CPC C23C 14/562 (2013.01) [B05C 5/02 (2013.01); C23C 14/228 (2013.01); H01B 12/06 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An apparatus for coating a substrate with a metallic coating, in a vacuum environment, wherein a background gas pressure in the vacuum environment is at most 1·10−1 Pascal, comprising:
a gas source for generating a metallic material in the gas phase, wherein the vapor pressure of the metallic material in the gas source is at least 1·101 Pascal;
wherein the gas source comprises an opening from which the gaseous metallic material flows into an expansion chamber installed between the gas source and a coating zone for the substrate;
wherein the expansion chamber is formed as a divergent part of a Laval nozzle having an inlet opening directed to the gas source and an outlet opening directed towards the coating zone such that a flow of the gaseous metallic material is parallelized with respect to the substrate;
wherein the expansion chamber is coated with an anti-adhesion coating and is actively cooled, and
wherein a lamellar diaphragm is arranged between the gas source and the inlet opening of the expansion chamber.