US 12,435,243 B2
Polishing of transition metals
Rajiv K. Singh, Newberry, FL (US); Sunny De, Gainesville, FL (US); Akshay Rajopadhye, Gainesville, FL (US); and Aditya D. Verma, Gainesville, FL (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Jun. 22, 2022, as Appl. No. 17/846,929.
Claims priority of provisional application 63/216,956, filed on Jun. 30, 2021.
Prior Publication US 2023/0002641 A1, Jan. 5, 2023
Int. Cl. C09G 1/02 (2006.01); H01L 21/321 (2006.01)
CPC C09G 1/02 (2013.01) [H01L 21/3212 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A composition comprising:
a liquid carrier;
titania abrasive particles, wherein the particles are at least partially coated with alumina or amorphous silica to provide coated titania abrasive particles;
wherein the coated titania abrasive particles have an average diameter of about 50 nm to about 250 nm; and
a corrosion inhibitor, wherein the pH is about 2 to about 5.