US 12,434,997 B2
Chemical liquid storage body
Tetsuya Kamimura, Haibara-gun (JP); Masahiro Yoshidome, Haibara-gun (JP); and Yukihisa Kawada, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on Apr. 5, 2024, as Appl. No. 18/627,780.
Application 18/627,780 is a division of application No. 16/787,197, filed on Feb. 11, 2020, granted, now 11,976,001.
Application 16/787,197 is a continuation of application No. PCT/JP2018/032173, filed on Aug. 30, 2018.
Claims priority of application No. 2017-170832 (JP), filed on Sep. 6, 2017; and application No. 2018-155196 (JP), filed on Aug. 22, 2018.
Prior Publication US 2024/0246853 A1, Jul. 25, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. B65D 23/02 (2006.01); C03C 17/00 (2006.01); C03C 17/245 (2006.01); C09G 1/00 (2006.01); G03F 7/004 (2006.01); H01L 21/027 (2006.01)
CPC C03C 17/245 (2013.01) [B65D 23/02 (2013.01); C03C 17/004 (2013.01); C09G 1/00 (2013.01); G03F 7/0048 (2013.01); C03C 2218/152 (2013.01); H01L 21/0274 (2013.01)] 20 Claims
 
1. A chemical liquid storage body comprising:
a container; and
a chemical liquid stored in the container,
wherein the chemical liquid contains at least one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni,
the number of particles having a particle diameter equal to or greater than 0.05 um is 5 to 500/ml in the chemical liquid,
in a case where the chemical liquid contains one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni, a content of the metal component with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
in a case where the chemical liquid contains two or more kinds of metal components selected from the group consisting of Fe, Al, Cr, and Ni, a total content of the metal components with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms,
the container is a gallon bottle and
provided that a region between a surface of the liquid contact portion and a position 10 nm below the surface in a thickness direction of the container is a surface region, a region between the surface and a position 2.0 μm below the surface in the thickness direction of the container is bulk region, B represents a content of sodium atoms in the bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in the surface region with respect to a total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion.
 
20. A chemical liquid storage body comprising:
a container; and
a chemical liquid stored in the container,
wherein the chemical liquid contains at least one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni,
in a case where the chemical liquid contains one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni, a content of the metal component with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
in a case where the chemical liquid contains two or more kinds of metal components selected from the group consisting of Fe, Al, Cr, and Ni, a total content of the metal components with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms,
the container is a gallon bottle and
provided that a region between a surface of the liquid contact portion and a position 10 nm below the surface in a thickness direction of the container is a surface region, a region between the surface and a position 2.0 μm below the surface in the thickness direction of the container is bulk region, B represents a content of sodium atoms in the bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in the surface region with respect to a total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion,
the glass further contains boron atoms, and
provided that H represents a content of boron atoms in the bulk region with respect to the total mass of the bulk region, and G represents a content of boron atoms in the surface region with respect to the total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of G to H represented by G/H is higher than 0.10 and less than 0.90 in at least a portion of the surface.