US 12,434,960 B2
Driving circuits for a piezoelectric microelectromechanical system mirror
Tapio Pernu, Espoo (FI)
Assigned to Teknologian tutkimuskeskus VTT Oy, Espoo (FI)
Appl. No. 17/778,017
Filed by Teknologian tutkimuskeskus VTT Oy, Espoo (FI)
PCT Filed Nov. 27, 2020, PCT No. PCT/FI2020/050802
§ 371(c)(1), (2) Date May 19, 2022,
PCT Pub. No. WO2021/105568, PCT Pub. Date Jun. 3, 2021.
Claims priority of application No. 20196026 (FI), filed on Nov. 28, 2019.
Prior Publication US 2022/0411255 A1, Dec. 29, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); H10N 30/80 (2023.01)
CPC B81B 3/004 (2013.01) [G02B 26/0858 (2013.01); H10N 30/802 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A Microelectromechanical System, MEMS, mirror apparatus, comprising:
a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror; and
a single supply drive signal connected to each of the at least two piezo actuators, wherein one end of each of the at least two piezo actuators is connected to the single supply drive signal and another end of each of the at least two piezo actuators is connected to at least one other piezo actuator.