US 12,434,921 B2
Travel robot for moving substrate transfer robot in vacuum chamber
Soo Jong Lee, Suwon-si (KR); Myung Jin Kim, Pyeongtaek-si (KR); Chang Seong Lee, Hwaseong-si (KR); Seung Young Baek, Osan-si (KR); Chang Hyun Jee, Anyang-si (KR); Sang Hwi Ham, Gunpo-si (KR); Moon Gi Hur, Gyeonggi-do (KR); Jae Hyun Park, Osan-si (KR); and Tae Han Lee, Yangju-si (KR)
Assigned to T-Robotics Co., Ltd., Osan-si (KR)
Filed by T-Robotics Co., Ltd., Osan-si (KR)
Filed on Apr. 18, 2022, as Appl. No. 17/723,106.
Claims priority of application No. 10-2021-0070273 (KR), filed on May 31, 2021.
Prior Publication US 2022/0380145 A1, Dec. 1, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. B65G 47/90 (2006.01); B61B 13/10 (2006.01)
CPC B65G 47/90 (2013.01) [B61B 13/10 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A travel robot for moving a substrate transfer robot in a vacuum chamber, comprising:
an elevating part which is located in a lower outer region of a housing, sealing an inside of the vacuum chamber, and has its upper end sealed to a vacuum chamber through-hole formed on a lower region of the housing, wherein the elevating part allows an elevating drive shaft having a hollow formed therein to be moved up and down through the vacuum chamber through-hole;
a travel arm platform through which a (1_1)-st coupling hole, a (1_2)-nd coupling hole and a (1_3)-rd coupling hole are formed respectively at a first center area, a first one-end area and a first opposite-end area thereof, wherein a (1_1)-st locking member, through which a (1_1)-st through-hole corresponding to the hollow of the elevating drive shaft is formed, compartmentalizes the (1_1)-st coupling hole into a (1_1)-st upper space sealed by a (1_1)-st cover and a (1_1)-st lower space, wherein a (1_2)-nd locking member, through which a (1_2)-nd through-hole is formed, compartmentalizes the (1_2)-nd coupling hole into a (1_2)-nd upper space and a (1_2)-nd lower space sealed by a (12)-nd cover, wherein a (1_3)-rd locking member, through which a (1_3)-rd through-hole is formed, compartmentalizes the (1_3)-rd coupling hole into a (1_3)-rd upper space and a (1_3)-rd lower space sealed by a (1_3)-rd cover, and wherein the elevating drive shaft inserted into the (1_1)-st lower space is fixedly engaged with the (1_1)-st locking member;
a first travel arm part including a (1_1)-st travel link arm and a (1_2)-nd travel link arm, wherein a first travel driving motor and a first speed reducer, interlocked with the first travel driving motor to reduce a rotational speed of the first travel driving motor by half, are installed in a sealed inner space of the (1_1)-st travel link arm, wherein a (1_1)-st drive shaft, having a hollow formed therein and interlocked with the first speed reducer, and a (1_1)-st output shaft interlocked with the (1_1)-st drive shaft are sealingly installed on a (1_1)-st one-end area of the (1_1)-st travel link arm, wherein a (1_2)-nd drive shaft, having a hollow formed therein and interlocked with the first travel driving motor, and a (1_2)-nd output shaft interlocked with the (1_2)-nd drive shaft are sealingly installed on a (1_1)-st opposite-end area of the (1_1)-st travel link arm, wherein the (1_1)-st output shaft of the (1_1)-st travel link arm is fixedly engaged with a (1_1)-st linking member that is inserted into the (1_2)-nd upper space of the travel arm platform to be fixedly engaged with the (1_2)-nd locking member, and wherein a (1_2)-nd one-end area of the (1_2)-nd travel link arm is fixedly engaged with the (1_2)-nd output shaft of the (1_1)-st travel link arm;
a second travel arm part including a (2_1)-st travel link arm and a (2_2)-nd travel link arm, wherein a second travel driving motor and a second speed reducer, interlocked with the second travel driving motor to reduce a rotational speed of the second travel driving motor by half, are installed in a sealed inner space of the (2_1)-st travel link arm, wherein a (2_1)-st drive shaft, having a hollow formed therein and interlocked with the second speed reducer, and a (2_1)-st output shaft interlocked with the (2_1)-st drive shaft are sealingly installed on a (2_1)-st one-end area of the (2_1)-st travel link arm, wherein a (2_2)-nd drive shaft, having a hollow formed therein and interlocked with the second travel driving motor, and a (2_2)-nd output shaft interlocked with the (2_2)-nd drive shaft are sealingly installed on a (2_1)-st opposite-end area of the (2_1)-st travel link arm, wherein the (2_1)-st output shaft of the (2_1)-st travel link arm is fixedly engaged with a (1_2)-nd linking member that is inserted into the (1_3)-rd upper space of the travel arm platform to be fixedly engaged with the (1_3)-rd locking member, and wherein a (2_2)-nd one-end area of the (2_2)-nd travel link arm is fixedly engaged with the (2_2)-nd output shaft of the (2_1)-st travel link arm; and
a transfer robot coupling part whose second one-end area is rotatably engaged with a (1_2)-nd opposite-end area of the (1_2)-nd travel link arm, whose second opposite-end area is rotatably engaged with a (2_2)-nd opposite-end area of the (2_2)-nd travel link arm, and whose second center area has a rotation driving motor built thereon, wherein the rotation driving motor is sealingly engaged with the substrate transfer robot, for transferring a substrate, by a rotation drive shaft having a hollow formed therein.