US 12,434,378 B2
Horizontal articulated robot and substrate transfer system comprising same
Junichi Matsuoka, Kobe (JP); Masaru Yamasaki, Kobe (JP); and Yuichiro Tanaka, Kobe (JP)
Assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe (JP)
Appl. No. 17/797,731
Filed by Kawasaki Jukogyo Kabushiki Kaisha, Kobe (JP)
PCT Filed Feb. 2, 2021, PCT No. PCT/JP2021/003669
§ 371(c)(1), (2) Date Aug. 5, 2022,
PCT Pub. No. WO2021/157552, PCT Pub. Date Aug. 12, 2021.
Claims priority of application No. 2020-019879 (JP), filed on Feb. 7, 2020.
Prior Publication US 2023/0071716 A1, Mar. 9, 2023
Int. Cl. B25J 9/04 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC B25J 9/042 (2013.01) [H01L 21/67742 (2013.01); H01L 21/68707 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A horizontal articulated robot comprising:
a base;
an arm coupled to the base to be rotatable horizontally and formed by links, the links being coupled to one another to be rotatable horizontally; and
an end effector coupled to the arm to be rotatable horizontally, wherein
at least one link of the links has an internal space, and
the at least one link has a partition partitioning the internal space into two container rooms, and each of the two container rooms is configured to completely house a component that includes a motor, wherein
the motors of the two container rooms are configured to rotationally drive the links and the end effector,
the at least one link has a ceiling wall and a bottom wall that define at least a part of the internal space and are separated from each other vertically,
the partition extends from the ceiling wall to the bottom wall,
the at least one link includes a housing that defines an outer shape of the at least one link,
the housing includes a housing body having the ceiling wall and the bottom wall,
wherein the partition is located in between the motors, rotation shafts of the motors are orientated in opposite directions, and the ceiling wall, the bottom wall, and the partition are a single integrated structure, and the ceiling wall, the bottom wall, and the partition form an S-shape viewed from a side view.